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img{max-width:100%} Varian D-F5362-1 Automatic Cryopump Regeneration Panel PCB F5362001 VSEA Working
Part No: D-F3164001
UPPER NP8148G003-1 1
The unit powers and boots to a password screen
TEL Tokyo Electron 300mm CPL Chilling Hot Plate 5085-408084-11 Lithius Partial img{max-width:100%} Varian D-F5362-1 Automatic CryopumpTEL Tokyo Electron 300mm CPL Chilling Hot Plate 5085 408084 11 Lithius Partial Inventory # A 19757 Model No: CPL Chilling Hot Plate Process Station 5085 408084 11 Removed from a TEL Tokyo Electron Clean Track Lithius System Sold As Is Made in Japan Installed Components Omron Part No: E3X DA11 N (Qty. 2) This TEL Tokyo Electron 300mm CPL Chilling Hot Plate is used working surplus. The unit is missing the front cover & PCB, the RCC 300 controller, and
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