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ASM 16-332178E01-D 200mm OP3 Square Rib Quartz Semiconductor Process Chamber New img{max-width:100%} Aera PI-98 PI-980 MassASM 16 332178E01 D 200mm OP3 Square Rib Quartz Semiconductor Process Chamber New Part No: 16 332178E01 D This item is new surplus. The physical condition is great. Sale Details Item Condition: New, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 34"x27"x32" @ 88 lbs.; Requires Freight Shipping Shipping Terms: All Domestic and International shipping quotes and or fees are subject to change due to packaging requirements, custom