Kepner Products Pilot/Gauge Manifold ASM Epsilon 3000 Wafer Transfer Module Used This Edwards C31315000 right angle

This Edwards C31315000 right angle isolation valve with D02182000 active pirani gauge is used working surplus

Inventory # CONJ-2639

Inventory # A28364

Tegal Part No: VME-PS400-01

Kepner Products Pilot/Gauge Manifold ASM Epsilon 3000 Wafer Transfer Module Used This Edwards C31315000 right angleKepner Products Pilot Gauge Manifold ASM Epsilon 3000 Wafer Transfer Module Used Inventory # K 5634 This Kepner Products Pilot Gauge Manifold is used working surplus. The physical condition is good, but there are signs of previous use and handling. Removed from a ASM Epsilon 3000 Wafer Transfer Module. Specifications Part No: Pilot Gauge Manifold Removed from a ASM Epsilon 3000 Wafer Transfer Module Sale Details Item Condition: Used Working, 90 Day