Inventory # 19108
Estimated Packed Shipping Dimensions: L x W x H = 42"x42"x48" @ 720 lbs
The units cooling lines have been removed and will need to be replaced (see photos)
This TEL Tokyo Electron ES3D10-351468-V1 Plater Chamber BTM3 FC3 is new surplus
UNIT Instruments Mass Flow Controller MFC UFC-1100 UFC-1500A UFC-1160 Lot of 20 Inventory # 19108UNIT Instruments Mass Flow Controller MFC UFC 1100 UFC 1500A UFC 1160 Lot of 20 Model No: UFC Series May Require Calibration Reseller Lot of 20 Made in the USA Included Components Part No: UFC 1160A, 100 SCCM, N2 Part No: UFC 1500A, 10 SLM, N2 Part No: UFC 1100, 300 SCCM, N2 Part No: UFC 1200A, 20 SCCM, N2 Part No: UFC 1100N, 20 SLM, N2 Part No: UFC 1100, 5 SLM (SLPM), N2 (Qty. 4) Part No: UFC 1200A, 200 SCCM, SF6 Part No: UFC 1160, 100 SCCM, SF6