Novellus Systems 02-103960-00 Platform Controller P166/64MEG 03-053424-00 Spare Lam Research Part No: 810-077433-002

Lam Research Part No: 810-077433-002 Rev

Part No: 0027104-000

Inventory # CONF-687

Includes Calibration Data Sheet This Tylan FC-2901MEP Mass Flow Controller MFC is refurbished surplus

Novellus Systems 02-103960-00 Platform Controller P166/64MEG 03-053424-00 Spare Lam Research Part No: 810-077433-002Novellus Systems 02 103960 00 Platform Controller P166 64MEG 03 053424 00 Spare Inventory # CONJ 891 Part No: 02 103960 00 Model No: PLTFM CNTRLR,P166 64MEG Rev. C Processor: P166 RAM: 64MB Hard Disk: Undetermined Installed PCB's Motherboard Part No: 647633 204 Part No: 03 053424 00 CTI Connect Tech Part No: DAT08550, DFLEX8 (Qty. 2) Corman Technologies Part No: CT N108 US Robotics Part No: 0460, SPORTSTER MPM Part No: AD8 16, ADA 8 Digital Part No: